February 21, 2012 - Download

KLA 2401 Macro Defect Inspection System Available

Retronix has established processes and procedures to safely de-install, decontaminate, and reinstall used process equipment. Retronix has document control and process control systems to manage multi-tool projects for both wafer FAB's and equipment Brokers.

Tool Information Currently configured for 200mm Wafers MFG Date: March 1992 Serial Number 2199080723 Install Type: Ballroom System SW: Known as DIAG 2401 KLA Viper Macro Defect Inspection System Load/Unload Cassette Station PRI Automation Robot PRI Automated Single Wafer Prealign 4.6 GB Optical Hard Drive Mitsubishi CP700 Digital Color Printer Mounted Color Control Monitor Electrical: 1 Phase/50-60 Hz/115-230V Contains Class 1 Laser Facilities Hook-Up Requirements AC Power IN 115-230 VAC, 50-60 Hz PMAX400VA